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VCTC - VAC Cluster Tool Controller

The open solution for complex equipment systems
 
VCTCVAC Cluster Tool Controller (VCTC) is an innovative system software for implementing control for Cluster Tools and inline equipment on PC platforms running on Windows NT, 2000 and XP. Together with the VMEC Modular Equipment Controller you can implement comprehensive control solutions including process and transport module controllers efficiently and reliably. The VAC FabLink for SECS/GEM and the EDA solutions from Siemens are available for integrating the system into your Fab Automation.
 
Cluster Tool Controller

The VCTC is characterised by openness, scalability and modularity. It is an open and highly flexible system for making adaptations to new transport and process modules with little effort and expense. Integration of load/unload ports as well as process modules from different manufacturers can be done easily. All the important functionalities such as job, program and recipe management are fully implemented.

Batch logging based on XML, trending for process values, an integrated, configurable messaging system as well as user rights administration are already included in the scope of delivery.
The application is programmed using the graphical editor from the VAC NT/32 automation tool. Function expansions can be graphically programmed or implemented using high-level language (C++, C#, .net Assemblies, Jscript, ...).

 
Properties
  • Online VisualisationOnline visualisation (GUI)
  • Job Management
  • Program and recipe management for the entire equipment and the single process modules
  • Carrier Management
  • Substrat Tracking / Material Movement
  • Alarm Handling, configurable message administration
  • Log management, batch logs and data logging
  • Trending, online/offline trend for each module with a display of the selected values
  • User administration
  • Conforms with SEMI Standards (200 and 300mm)

 
   Product description with technical data sheet
 
 

VCTC- Support




  
New Service Pack is available:
The Service Pack 2 for VAC NT/32 Version 4.3 is available for download 
 
Ad-hoc information:
The AIS is becoming part of
the Roth & Rau concern
 
Innovationsforum
22.- 23. January 2009 in Dresden 
 
SPS/IPC DRIVES
25. - 27. November 2008 in Nuremberg
 
SEMICON Europe
7. - 9. October 2008 in Stuttgart
 
Innotrans
23. - 26. September 2008 in Berlin
 
PSE
16. - 17. September 2008 in Garmisch-Partenkirchen
 
PVSEC
1. - 4. September 2008 in Valencia (Spain)
 
SEMICON WEST
15. - 17. July 2008 in San Francisco (USA)
 
AUTOMATICA
10. - 13. June 2008 in Munich
AIS Automation
Dresden GmbH