Total Fab Monitoring
Equipment Performance Tracking: Evaluate the efficiency of your equipment
Total Fab Monitoring (TFM) represents a powerful software solution for Equipment Performance Tracking (EPT) combined with Online Equipment Monitoring. This means it can be used as a measuring and evaluation system in all areas of production and offers the user a comprehsive overview of the efficiency of his production equipment at any time.
In addition to the main applications for the semiconductor industry, electronics manufacturing and Microsystems technology (SEMI E10, SEMI E58), the TFM is also ideal for a variety of other industry sectors where you need to monitor machines and automatically determine availability indiators.
The TFM system is scalable with respect to its functions. The following modules are available:
- Online visualisation
- Error statistics
- Machine state statistics
- Throughput
- RAM indicators
- OEE indicator
- Report
- Trending
- Alarm Log
- Single Wafer Tracking
For vertical integration of different machines and equipment a variety of interfaces (including CORBA, MSMQ, TIBrv, SECS/GEM, XML, OPC, field buses, serial interfaces, databases) are available.
Wafer Tracking Modul
Especially when machines are arranged in clusters there is a need to:
- Consider the cluster components (such as process chambers) with respect to their availability
- Track each single material (e.g., wafers) inside the equipment.
This highlights the potential for improvement within a machine, in particular for applications in the semiconductor industry (front end).
Configurability
The system can be adapted and expanded by the user himself with respect to the connected machines and their locations by simply entering the configuration.
Scalability
In addition to the scalability of the function modules, the system is also variable with respect to the number of connected machines. The quantity structure typically ranges from 5 to 20 machines up to several hundred machines (largest installed system with 1200 machines).
Distribution capability of the system
Company-wide information distribution is handled by a client-server architecture. The equipment integration can be done within the system or by means of distributed integration solutions (interface adapters or cell controllers). One or more servers will be employed depending on the number of connected machines.
Your benefits at a glance
- Assistance in analysis and improvement of your production sequences
- Ensuring high availability of the monitored equipments by means of weakness analysis based on automatically gathered availability data and statistical error evaluation.
- Current information about the state of the machines for faster response times to errors
- Monitoring of agreed upon availability data for their fulfillment (OEE / RAM)
- Support in determining available capacities of your machines (Uptime / UPH)
- Reduction in manual data handling for production and error analysis
- Analysis and documentation of improvement results
- Support in ramp-up when introducing new products or equipments
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Ad-hoc information:
The AIS is becoming part of
the Roth & Rau concern
PVSEC
1. - 4. September 2008 in Valencia (Spain)
PSE
16. - 17. September 2008 in Garmisch-Patenkirchen
Innotrans
23. - 26. September 2008 in Berlin
SEMICON Europe
7. - 9. October 2008 in Stuttgart
SPS/IPC DRIVES
25. - 27. November 2008 in Nuremberg
SEMICON WEST
15. - 17. July 2008 in San Francisco (USA)
AUTOMATICA
10. - 13. June 2008 in Munich
The AIS is becoming part of
the Roth & Rau concern
PVSEC
1. - 4. September 2008 in Valencia (Spain)
PSE
16. - 17. September 2008 in Garmisch-Patenkirchen
Innotrans
23. - 26. September 2008 in Berlin
SEMICON Europe
7. - 9. October 2008 in Stuttgart
SPS/IPC DRIVES
25. - 27. November 2008 in Nuremberg
SEMICON WEST
15. - 17. July 2008 in San Francisco (USA)
AUTOMATICA
10. - 13. June 2008 in Munich
AIS Automation
Dresden GmbH
Dresden GmbH