Automation: Our World.

 


 

EDA / Interface A – Equipment Data Aquisition

Equipment and process data for EES
 
The data volumes required by modern engineering solutions such as APC (Advanced Process Control), monitoring systems (EPT) and other EES applications (Equipment Engineering Systems) can not be provided by the traditional SECS/GEM interface.
EDA resp. Interface A is a new interface standard for the semiconductor industry. EDA represents a second equipment interface along with the already used SECS/GEM interface and serves to provide large quantities of equipment and process data. In contrast to SECS/GEM, EDA enables the linking of a piece of equipment with several EES applications.
 
EDA is founded on Web-based software technologies such as XML, SOAP and WebServices and is defined in several SEMI Standards:

  • Common Equipment Model (E120) - Definition of the equipment structure
  • Equipment Self Description (E125) - Self-description of the equipment
  • Data Collection Management (E134) - Management of data collection plans
  • Authorization and Authentication (E132) - Administration of access rights
 
equipment control

 
We offer complete EDA solutions for your Equipment Control Systems. Just ask us!


 
  Webcam of the construction of the new AIS building

Ad-hoc information:
The AIS is becoming part of
the Roth & Rau concern

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