Facility Automation

Facility Automation for semiconductor manufacturing

The clean room, where the most modern equipment is used to produce semiconductors under controlled and consistent ambient conditions, is the heart of any semiconductor manufacturing facility.
The requirements are not limited to guarantee room temperature, relative humidity and air pressure exactly with the prescribed values. Supply and disposal of the media, such as ultra pure water, chemicals and gases must be ensured around the clock.

We offer a consistent, continuous automation concept

Based on the SIMATIC PCS 7 process control system from Siemens AG, a concept for continuous automation of all groups in and around the clean room has been developed. Thanks to uniform and standardised interfaces, the time required for implementing monitoring and control systems for the individual groups (gas, chemicals, …) and their integration into the FMCS (Facility Monitoring and Control System) can be significantly reduced. In particular, the use of software modules (typicals) results in an effective and uniform solution. The costs for spare parts inventory, maintenance and training are significantly reduced, since only one base system needs to be serviced.

As a service provider in this area we bring 10 years of experience which we would be happy to apply to your projects.

Webcam of the construction of the new AIS building

Ad-hoc information:
The AIS is becoming part of
the Roth & Rau concern

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