Facility Monitoring

Facility Monitoring for semiconductor manufacturing

Based on the SIMATIC PCS 7 process control system from Siemens AG, a concept for continuous monitoring and automation of all groups in and around the clean room has been developed.
The system features modular construction and is easily scalable. It is also characterised by a well-engineered software library customised for the facilities, comprised of software modules with standard functionalities.

Consistent monitoring concept

The monitoring system takes over both the representation of the entire system as well as the detail views for the connected chemical and gas supply systems, ultra pure and waste water system, polishing agent systems and exhaust gas disposal system. Additional functions such as message management, trend and archiving functions for process values, and logging are also provided.

For the integration and merging of facility automation with factory automation in the Fab which will be increasingly in demand in the future, we offer integration strategies based on the new SEMATECH interface standards.

Performance and system properties

High performance and outstanding system properties, together with consistent data storage, communication and project planning, guarantee that the typical requirements for a process control system are fully met by the SIMATIC PCS 7:
Facility Monitoring

Easy and secure process control
Convenient operation and visualisation
High-performance, fast and system-wide engineering
System-wide online modification capability
Redundancy on all levels
Foolproof automation solutions
Comprehensive field bus integration
Direct integration into the IT world.

Webcam of the construction of the new AIS building

Ad-hoc information:
The AIS is becoming part of
the Roth & Rau concern

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