VCTC - VAC Cluster Tool Controller

The open solution for complex equipment systems

VAC Cluster Tool Controller (VCTC) is an innovative system software for implementing control for Cluster Tools and inline equipment on PC platforms running on Windows NT, 2000 and XP. Together with the VMEC Modular Equipment Controller you can implement comprehensive control solutions including process and transport module controllers efficiently and reliably. The VAC FabLink for SECS/GEM and the EDA solutions from Siemens are available for integrating the system into your Fab Automation.

The VCTC is characterised by openness, scalability and modularity. It is an open and highly flexible system for making adaptations to new transport and process modules with little effort and expense. Integration of load/unload ports as well as process modules from different manufacturers can be done easily. All the important functionalities such as job, program and recipe management are fully implemented.

Batch logging based on XML, trending for process values, an integrated, configurable messaging system as well as user rights administration are already included in the scope of delivery. The application is programmed using the graphical editor from the VAC automation tool. Function expansions can be graphically programmed or implemented using high-level language (C++, C#, .net Assemblies, Jscript, ...).

Properties

  • Online visualisation (GUI)
  • Job Management
  • Program and recipe management for the entire equipment and the single process modules
  • Carrier Management
  • Substrat Tracking / Material Movement
  • Alarm Handling, configurable message administration
  • Log management, batch logs and data logging
  • Trending, online/offline trend for each module with a display of the selected values
  • User administration
  • Conforms with SEMI Standards (200 and 300mm)

VCTC-Prospekt (engl.)

VCTC- Support