Automation solutions for various industries

Semiconductor Industry

• EES-Equipment Engineering Systems
• Monitoring systems
• E-Diagnostic
• APC-Advanced Process Control
• MES-Manufacturing Execution Systems
• Equipment Integration, SECS/GEM, Interface A
• Facility-Automation
• Monitoring systems for gases, chemicals, wastewater, exhaust gas, …
• Control for supply and disposal systems

Production technology
(solar cell manufacturing/ automotive supplier industry/ electronics industry)

• Host computers/systems management for production lines
• Traceability systems
• Order administration
• Product and production data management
• Process data trending
• Preventive maintenance
• OEE calculation
• Work productivity

Special equipment
(vacuum technology/ thinfilm technology/ semiconductor technology)

• Controllers for evaporation systems and sputter systems
• Controllers for etching systems (plasma, ion beam)
• Controllers for surface machining (plasma, ion beam)
• Controllers for electron beam equipment
• Cluster tool, process module and transport module controllers
• Host interfaces

Railway technology
(marshalling/ energy technology)

• Automation of marshalling equipment for sequence control
• Brake controls
• Controllers for coupling alignment equipment
• Control technology for converters

Machines and systems
(environmental technology/ plastics industry/ energy supply)

• Machine controllers
• Host systems
• Diagnostic systems